The main purpose from this paper, in semiconductor technology silicon oxide is to study notable of the surface and catalysis process. As a result, cluster fragmentation processes, we obtained information about the emission of the clusters and the chemical and physical properties of the clusters. We found during the study that oxide clusters are heterogeneous clusters.  In heterogeneous clusters, the bonds in the main chain are different from the bonds in the side chain, as in organic polymers.  We tried to prove on the basis of the analysis of experimental data that the formation, excitation and molecular decomposition of Si_nO_{2n + 1}H_k- (k = 1-3) cluster ions are based on the model of the combinatorial synthesis mechanism.

Vibrationally

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